@Article{chien_et_al:DagRep.10.5.1,
  author =	{Chien, Chen-Fu and Ehm, Hans and Fowler, John W. and M\"{o}nch, Lars},
  title =	{{Decision-Making Modeling and Solutions for Smart Semiconductor Manufacturing (Dagstuhl Seminar 20452)}},
  pages =	{1--18},
  journal =	{Dagstuhl Reports},
  ISSN =	{2192-5283},
  year =	{2021},
  volume =	{10},
  number =	{5},
  editor =	{Chien, Chen-Fu and Ehm, Hans and Fowler, John W. and M\"{o}nch, Lars},
  publisher =	{Schloss Dagstuhl -- Leibniz-Zentrum f{\"u}r Informatik},
  address =	{Dagstuhl, Germany},
  URL =		{https://drops.dagstuhl.de/entities/document/10.4230/DagRep.10.5.1},
  URN =		{urn:nbn:de:0030-drops-137410},
  doi =		{10.4230/DagRep.10.5.1},
  annote =	{Keywords: Modeling, Simulation, Smart Manufacturing, Analytics, Semiconductor Manufacturing}
}