@Article{ehm_et_al:DagRep.13.9.69, author = {Ehm, Hans and Fowler, John and M\"{o}nch, Lars and Schorn, Daniel}, title = {{Decision-Making Techniques for Smart Semiconductor Manufacturing (Dagstuhl Seminar 23362)}}, pages = {69--102}, journal = {Dagstuhl Reports}, ISSN = {2192-5283}, year = {2024}, volume = {13}, number = {9}, editor = {Ehm, Hans and Fowler, John and M\"{o}nch, Lars and Schorn, Daniel}, publisher = {Schloss Dagstuhl -- Leibniz-Zentrum f{\"u}r Informatik}, address = {Dagstuhl, Germany}, URL = {https://drops.dagstuhl.de/entities/document/10.4230/DagRep.13.9.69}, URN = {urn:nbn:de:0030-drops-198216}, doi = {10.4230/DagRep.13.9.69}, annote = {Keywords: analytics, modeling, semiconductor manufacturing, simulation, smart manufacturing} }